Volume 24, Issue 1
The Nonlinear Dynamic Behaviors of Electrostatic Micro-Tweezers

Bo-Wun Huang, Chao-Jung Chen & Jao-Hwa Kuang

Commun. Comput. Phys., 24 (2018), pp. 253-267.

Published online: 2018-03

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  • Abstract

This work addresses the nonlinear dynamic behavior of different electrostatic micro-tweezers, a micro electric actuator. This actuator, a cantilever beam electrostatic micro-tweezers, has been extensively used in micro-electro-mechanical systems (MEMS). The importance of micro electric actuators manufactured is higher than the other part of MEMS since it is the power source of the entire micro-electro-mechanical systems. In actual operation, the instability and bad dynamic characteristics of the electric actuators will cause larger displacement mobility error, such as transport behavior and response procedures failure, etc., and even damage the micro-electro-mechanical systems. To improve the actuator dynamic displacement accuracy, the dynamic behavior in the electric actuator system must be studied, especially for nonlinear dynamic behavior of system. In this work, the differential quadrature method (DQM) was employed to solve the problem of nonlinearity in the equation of motion. The results reveal that the proposed DQM model can be used to simulate the nonlinear behavior of the micro-tweezers efficiently. Micro-tweezers of various shapes were studied to examine the feasibility of applying the DQM in analyzing their nonlinear responses. The simulated results agree very closely with the calculated and experimental data in the literature.

  • Keywords

Microelectromechanical, pull-in, Differential Quadrature Method (DQM), MEMS, electrostatic, micro-tweezers.

  • AMS Subject Headings

35G50, 37M05, 65E05

  • Copyright

COPYRIGHT: © Global Science Press

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@Article{CiCP-24-253, author = {}, title = {The Nonlinear Dynamic Behaviors of Electrostatic Micro-Tweezers}, journal = {Communications in Computational Physics}, year = {2018}, volume = {24}, number = {1}, pages = {253--267}, abstract = {

This work addresses the nonlinear dynamic behavior of different electrostatic micro-tweezers, a micro electric actuator. This actuator, a cantilever beam electrostatic micro-tweezers, has been extensively used in micro-electro-mechanical systems (MEMS). The importance of micro electric actuators manufactured is higher than the other part of MEMS since it is the power source of the entire micro-electro-mechanical systems. In actual operation, the instability and bad dynamic characteristics of the electric actuators will cause larger displacement mobility error, such as transport behavior and response procedures failure, etc., and even damage the micro-electro-mechanical systems. To improve the actuator dynamic displacement accuracy, the dynamic behavior in the electric actuator system must be studied, especially for nonlinear dynamic behavior of system. In this work, the differential quadrature method (DQM) was employed to solve the problem of nonlinearity in the equation of motion. The results reveal that the proposed DQM model can be used to simulate the nonlinear behavior of the micro-tweezers efficiently. Micro-tweezers of various shapes were studied to examine the feasibility of applying the DQM in analyzing their nonlinear responses. The simulated results agree very closely with the calculated and experimental data in the literature.

}, issn = {1991-7120}, doi = {https://doi.org/10.4208/cicp.OA-2017-0054}, url = {http://global-sci.org/intro/article_detail/cicp/10936.html} }
TY - JOUR T1 - The Nonlinear Dynamic Behaviors of Electrostatic Micro-Tweezers JO - Communications in Computational Physics VL - 1 SP - 253 EP - 267 PY - 2018 DA - 2018/03 SN - 24 DO - http://doi.org/10.4208/cicp.OA-2017-0054 UR - https://global-sci.org/intro/article_detail/cicp/10936.html KW - Microelectromechanical, pull-in, Differential Quadrature Method (DQM), MEMS, electrostatic, micro-tweezers. AB -

This work addresses the nonlinear dynamic behavior of different electrostatic micro-tweezers, a micro electric actuator. This actuator, a cantilever beam electrostatic micro-tweezers, has been extensively used in micro-electro-mechanical systems (MEMS). The importance of micro electric actuators manufactured is higher than the other part of MEMS since it is the power source of the entire micro-electro-mechanical systems. In actual operation, the instability and bad dynamic characteristics of the electric actuators will cause larger displacement mobility error, such as transport behavior and response procedures failure, etc., and even damage the micro-electro-mechanical systems. To improve the actuator dynamic displacement accuracy, the dynamic behavior in the electric actuator system must be studied, especially for nonlinear dynamic behavior of system. In this work, the differential quadrature method (DQM) was employed to solve the problem of nonlinearity in the equation of motion. The results reveal that the proposed DQM model can be used to simulate the nonlinear behavior of the micro-tweezers efficiently. Micro-tweezers of various shapes were studied to examine the feasibility of applying the DQM in analyzing their nonlinear responses. The simulated results agree very closely with the calculated and experimental data in the literature.

Bo-Wun Huang, Chao-Jung Chen & Jao-Hwa Kuang. (2020). The Nonlinear Dynamic Behaviors of Electrostatic Micro-Tweezers. Communications in Computational Physics. 24 (1). 253-267. doi:10.4208/cicp.OA-2017-0054
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