TY - JOUR
T1 - Model Analysis and Parameter Extraction for MOS Capacitor Including Quantum Mechanical Effects
JO - Journal of Computational Mathematics
VL - 3
SP - 401
EP - 411
PY - 2006
DA - 2006/06
SN - 24
DO - http://doi.org/
UR - https://global-sci.org/intro/article_detail/jcm/8761.html
KW - Poisson Equation, Schrödinger Equation, MOS Capacitor, Quantum Effect,
Sensitivity, Parameter Extraction.
AB - <p style="text-align: justify;">The high frequency CV curves of MOS capacitor have been studied. It is shown that semiclassical model is a good approximation to quantum model and approaches to classical model when the oxide layer is thick. This conclusion provides us an efficient (semiclassical) model including quantum mechanical effects to do parameter extraction for ultrathin oxide device. Here the effective extracting strategy is designed and numerical experiments demonstrate the validity of the strategy.</p>